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Simulation Software for Semiconductor Photolithography Equipment: TrackSim
반도체 포토 장비의 시뮬레이션 소프트웨어: TrackSim
2012
Journal of the Korea Academia-Industrial cooperation Society
반도체 포토 장비의 시뮬레이션 소프트웨어: TrackSim
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TrackSim provides 3D simulation environment for evaluating, validating, and scheduling the photolithography process. ...
One of the major characteristics of TrackSim is in that it is developed based on Applied Materials' AutoMod, a discrete event simulation software broadly used in semiconductor industry. ...
The scheduler of the TrackSim uses the deadlock-free scheduling method developed by Yoon and Lee [9, 10]. ...
doi:10.5762/kais.2012.13.8.3319
fatcat:5cfzwliq5nhn5ity5qvwuca2di
Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows
2006
IEEE transactions on semiconductor manufacturing
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A cluster tool for semiconductor manufacturing consists of several single-wafer processing chambers and a wafer-handling robot in a closed environment. ...
Such a reentrant wafer flow complicates scheduling and control of the cluster tool and often causes deadlocks. ...
His research interests include modeling, scheduling, control, and control software architecture for automated manufacturing systems such as cluster tools and track equipment for semiconductor manufacturing ...
doi:10.1109/tsm.2006.873402
fatcat:tl4jw6mq7bdyhob5uzgq7ysjuy
Survey of research in modeling conveyor-based automated material handling systems in wafer fabs
2007
2007 Winter Simulation Conference
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Automated material handling systems (AMHS) play a central role in modern wafer fabrication facilities (fabs). ...
This paper discusses literature related to models of conveyor systems in semiconductor fabs. A comprehensive overview of simulation-based models is provided. ...
for free conveyor space to accommodate it. ...
doi:10.1109/wsc.2007.4419803
dblp:conf/wsc/NazzalE07
fatcat:ojozx6fjenfftceipk7h54eq5a
Automation and Integration in Semiconductor Manufacturing
[chapter]
2010
Semiconductor Technologies
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Semiconductor manufacturing arose from the interface and control of lot track in/out operations between processing tool and the host computer, MES (Manufacturing Execution System). ...
PVD cluster tools are used for vacuum film deposition on semiconductor wafers and are widely used in the fabrication of modern VLSI (Very Large Scaled Integration) circuits. ...
How to reference In order to correctly reference this scholarly work, feel free to copy and paste the following: Da-Yin Liao (2010) . ...
doi:10.5772/8569
fatcat:qif42unkindlxewh6a7zondnsu
A Review of Recent Advances in Automated Guided Vehicle Technologies: Integration Challenges and Research Areas for 5G-Based Smart Manufacturing Applications
2020
IEEE Access
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AoRs that must be comprehensively explored for 5G systems to be fully utilizable for AGV fleet management. ...
are integrated as part of enterprise communication systems for smart manufacturing applications. ...
However, due to the huge expense and initial capital involved with semiconductor fabrication plants, there are still needs for extensive research so as to be able to optimize performances of AGV systems ...
doi:10.1109/access.2020.3035729
fatcat:lhhe2ur2v5fffb32vnd5p56usm
Hardware/software partitioning of operating systems: focus on deadlock detection and avoidance
2005
IEE Proceedings - Computers and digital Techniques
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a system with deadlock detection in software. ...
a system avoiding deadlock in software; furthermore, in our example, the DAU only consumes .005% of the MPSoC total chip area. ...
We would like to acknowledge donations received from Denali, HP, Intel, QualCore, Mentor Graphics, National Semiconductor, Sun and Synopsys. ...
doi:10.1049/ip-cdt:20045078
fatcat:jwnaimj7offxlihkbnxvmwf7f4
Congestion-aware dynamic routing in automated material handling systems
2014
Computers & industrial engineering
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In 300mm wafer fabrication facilities, the current technology generation, various types of automated material handling systems (AMHSs) are used, including track and conveyor-based systems. ...
Semiconductor manufacturing facilities, also know as wafer fabrication facilities or wafers fabs, are typically organized into bays. ...
doi:10.1016/j.cie.2014.02.002
fatcat:bi4f75m7zne3tarvrwa6ijcf74
Planar adaptive network-on-chip supporting deadlock-free and efficient tree-based multicast routing method
2012
Microprocessors and microsystems
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Both NoC microarchitectures support a deadlock-free static and efficient adaptive tree-based multicast routing method. ...
Furthermore, a pheromone tracking strategy is proposed in this paper in order to reduce communication energy in the adaptive tree-based multicast routing method. ...
adaptive multiprocessing systems for smart-structures (adaptronic systems) within Project AdRIA (Adaptronik-Research, Innovation, Application) funded by Hessian Ministry of Science and Arts with Grant ...
doi:10.1016/j.micpro.2012.04.003
fatcat:kjfqduvrbzbhpktyfu57tsfjii
Event-based recognition and source identification of transient tailbacks in manufacturing plants
2012
Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC)
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Automated material handling systems in complex manufacturing plants oftentimes exhibit, possibly transient, tailback phenomena, which reduce a production line's throughput. ...
Each tailback consists of a reconstructed queue of loads waiting for preceding loads. For each tailback an initial cause event is determined. ...
Focusing on the test of control systems Versteegt and Verbraeck (2002) used track data inspection methods in order to check the correct behavior of modeled transport systems. ...
doi:10.1109/wsc.2012.6465013
dblp:conf/wsc/SchwenkeWGK12
fatcat:xmi7sbdrbbet7kkcdwpz6gqmmq
Truss: A Reliable, Scalable Server Architecture
2005
IEEE Micro
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Central to TRUSS' practical fault-tolerant design is Membrane, a conceptual fault-isolation boundary that confines the effects of a component failure to the processor, memory, or I/O subsystem in which ...
Acknowledgments This research was supported in part by NSF awards ACI-0325802 and CCF-0347560, Intel Corp., the Center for Circuit and System Solutions (C2S2), and the Carnegie Mellon CyLab. ...
We thank the SimFlex team at Carnegie Mellon for the simulation infrastructure and valuable feedback on early drafts of this article. ...
doi:10.1109/mm.2005.122
fatcat:a3urbn37lvb3nczygzlhny6bae
2020 Index IEEE Transactions on Systems, Man, and Cybernetics: Systems Vol. 50
2020
IEEE Transactions on Systems, Man & Cybernetics. Systems
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The Author Index contains the primary entry for each item, listed under the first author's name. ...
-that appeared in this periodical during 2020, and items from previous years that were commented upon or corrected in 2020. ...
., +, TSMC June 2020 2273-2283 Deadlock-Free Scheduling of Flexible Assembly Systems Based on Petri Nets and Local Search. ...
doi:10.1109/tsmc.2021.3054492
fatcat:zartzom6xvdpbbnkcw7xnsbeqy
SECAM
2004
IEEE robotics & automation magazine
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applications for integrated semiconductor manufacturing equipment. ...
between equipment and shop floor control computers or manufacturing execution systems (MESs), not for module communication within equipment. ...
We also thanks for Joosung Engineering Ltd., Korea, a cluster tool vendor, for kind advice and information as well as partial financial support. ...
doi:10.1109/mra.2004.1275965
fatcat:uzhdyzwqvvaxzj7xnbqnvbyqku
Software and the concurrency revolution
2005
Queue
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Larus received his Ph.D. in computer science from the ...
www.acmqueue.com/forums HERB SUTTER is a software architect in Microsoft's developer division. ...
For the past three decades, improvements in semiconductor fabrication and processor implementation produced steady increases in the speed at which computers executed existing sequential programs. ...
doi:10.1145/1095408.1095421
fatcat:kygmzir25fduzntmfilihm2pku
2001 ICRA IEEE International Conference on Robotics and Automation
2001
Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164)
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A number of special efforts were made in the preparation of this conference: For the first time in the history of this conference, an on-line electronic system was used to handle paper submissions, reviews ...
These special sessions will focus on technology developments in automation of the automobile industry, semiconductor industry, and steel industry in Korea. ...
Identification of Potential Deadlock Set in Semiconductor Track Systems ........................................ ...
doi:10.1109/robot.2001.933107
fatcat:7qetan5gxbhyxc6hhfhgmesvya
Multi-core: Adding a New Dimension to Computing
[article]
2010
arXiv
pre-print
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Since then, sustaining development and advancement in electronics and fabrication techniques has caused the devices to shrink in size and become smaller, paving the quest for increasing density and clock ...
In this paper, we explore state of the art technologies for multi-core processors and existing software tools to support parallelism. ...
or deadlock. ...
arXiv:1011.3382v1
fatcat:lytsvogjibgkvjr5ty5abtecae
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