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"Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR ..."

Xu Mao et al. (2013)

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DOI: 10.1109/NEMS.2013.6559724

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  dblp key:
  - conf/nems/MaoFZYQY13
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  - https://dblp.org/rec/conf/nems/MaoFZYQY13
Xu Mao, Zhiqiang Fang, Zhe Zhang, Jinling Yan, Zhimei Qi, Fuhua Yang:
Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor. NEMS 2013: 244-247

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