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"Development of micro/nano displacement sensor for piezoelectric actuator."

Yong Yu, Bo Song, YunJian Ge (2009)

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DOI: 10.1109/IROS.2009.5354460

access: closed

type: Conference or Workshop Paper

metadata version: 2019-04-03

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Yong Yu, Bo Song, YunJian Ge:
Development of micro/nano displacement sensor for piezoelectric actuator. IROS 2009: 3290-3296

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