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Development of micro/nano displacement sensor for piezoelectric actuator
2009
2009 IEEE/RSJ International Conference on Intelligent Robots and Systems
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Whatever the simulation results in FEM or the experiment data, both of which show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale. ...
Micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. ...
The PZT displacement sensor will be used for PZT position control, in order to solve the hysteresis and nonlinear which influence the performance of micro/nano PZT actuator system. ...
doi:10.1109/iros.2009.5354460
dblp:conf/iros/YuSG09
fatcat:n467npzrzfb45puca3eajviny4
Development of the orthogonal microrobot for accurate microscopic operations
2008
Journal of Micro-Nano Mechatronics
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In this paper, we describe the development of an orthogonal microrobot for accurate microscopic operations. ...
To conduct the microscopic operation, a simple locomotion mechanism composed of one piezoelectric actuator and two U-shaped electromagnets is proposed. ...
Acknowledgement Part of this study was supported by the Industrial Technology Research Grant Program in'05 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan. ...
doi:10.1007/s12213-008-0010-1
fatcat:ylwh6vcrwjezthehgl47k5q6ji
Experimental studies on a micromanipulator for micro/nano manipulation
2008
APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
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Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. ...
This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. ...
In particular, due to its promising applications in micro/nano manipulation fields, the XY CPM is the concentration of this paper. ...
doi:10.1109/apccas.2008.4746133
dblp:conf/apccas/XuL08
fatcat:tagvmuemebhgbdy7zbiblwkrsa
High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control
2007
Micro & Nano Letters
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Piezoelectric tube scanners are the actuators of choice in scanning probe microscopy. ...
The presence of this resonant mode limits the upper bound of a triangular scan rate to around 1/100th of the first mechanical resonance frequency. ...
the ones traced by the tube scanner damped using H 2 shunt and H 1 shunt
Micro & Nano Letters, 2007, 2, (1), pp. 9-12
Micro & Nano Letters, Vol. 2, No. 1, March 2007 ...
doi:10.1049/mnl:20065075
fatcat:pt3vdtlxazf2fcqvutujyoov5a
Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning
2015
Robotics and Computer-Integrated Manufacturing
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The rotational motion and translational displacement in the x direction can be decoupled by controlling the piezoelectric actuators in the x axis with the same displacement values in same and opposite ...
The compact flexure-based mechanism is directly driven by three piezoelectric actuators (PZTs) through decoupling mechanisms. ...
However, the orientation adjustment is also crucial for the alignment of micro/nano objects. Thus, 3-DOF planar micro/nano positioning mechanisms should be developed to fulfill the demands. ...
doi:10.1016/j.rcim.2014.10.003
fatcat:imwthjd2v5hofftl6opmgkdeyi
Robust Control Framework for Piezoelectric Actuation Systems in Micro/Nano Manipulation
2005
TENCON 2005 - 2005 IEEE Region 10 Conference
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Feasibility study of the framework for piezoelectric actuation systems in micro/nano manipulation is described. Simulation results validated the suitability of the proposed control approach. ...
Micro/nano manipulation has been identified as one of the key enabling technologies for many emerging challenges. ...
INTRODUCTION Micro/nano manipulation has been identified as one of the key enabling technologies for many research challenges such as: biomedical engineering, micro/nano manufacturing and assembly, micro ...
doi:10.1109/tencon.2005.301342
fatcat:h64wcon5yrbbvaapshpxrwscna
Inversion-free feedforward dynamic compensation of hysteresis nonlinearities in piezoelectric micro/nano-positioning actuators
2015
2015 IEEE International Conference on Robotics and Automation (ICRA)
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of a piezoelectric actuator. ...
The results demonstrate that the proposed methodology can be employed effectively for compensation of rate-dependent hysteresis nonlinearities without developing an inverse model. ...
The proposed actuator is a cantilevered type, employed widely for micromanipulation and assembly of objects in micro/nano scale levels [1] . ...
doi:10.1109/icra.2015.7139560
dblp:conf/icra/AljanaidehJR15
fatcat:3nopwfordvailljzljtydtu7ae
A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
2016
MATEC Web of Conferences
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This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. ...
The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation. ...
It is demonstrated that a considerable potentical of the stage for the applications in various micro/nano manipulations. ...
doi:10.1051/matecconf/20167701040
fatcat:d3jd4ukhkbh4fkqtsdpq6t25eu
Adaptive feed-forward controller of piezoelectric actuator for micro/nano-positioning
2018
Sadhana (Bangalore)
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In this paper, design and implementation of an adaptive feed-forward controller for micro/nanopositioning control of piezoelectric actuator (PEA) is described. ...
Discrete-time Dahl hysteresis-based mathematical model of the PEA is developed and the values of the model parameters are estimated through an autoregressive with exogenous terms (ARX) model identification ...
Figure 1 . 1 Open-loop time domain step response for a piezoelectric actuator.
Figure 2 . 2 (a) Block diagram of piezoelectric actuator. ...
doi:10.1007/s12046-018-0925-8
fatcat:g757576t2vbvlildo4r3xnvqyi
Recent Advances in Field‐Controlled Micro–Nano Manipulations and Micro–Nano Robots
2021
Advanced Intelligent Systems
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D) An untethered ultrasound-controlled actuator for targeted drug delivery. Reproduced with permission. [119] Copyright 2019, Springer Nature. ...
Recent research and applications of acoustic control. A) Acoustic controlled RBC-PL-robot for removal of pathogenic bacteria and toxins. Reproduced with permission. [115] Copyright 2017, ACS. ...
[37] The driving mechanism of natural organisms provides many examples for the development of micro-nano robots. ...
doi:10.1002/aisy.202100116
fatcat:2p4tandqgjhjbngplmdyxlwi4q
Experimental investigation of the tip based micro/nano machining
2017
Applied Surface Science
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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. ...
The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. ...
Acknowledgements This research is supported by National Natural Science Foundation of China (Nos. 51675371, 51675367, 51675376, 51405333, 51420105007) and EU H2020 FabSurfWAR (No. 644971). ...
doi:10.1016/j.apsusc.2017.07.181
fatcat:56dtcpy6jfaq3izdhtjdyfutle
B015 Development of a micro/nano-scale constant load cutting mechanism measuring the cutting force by an optical lever
2013
Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21
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A non-rigid micro/nano scale cutting mechanism that is capable to fabricate micro-grooves in a surface of some square centimeters with a constant cutting depth and even on inclined surfaces has been developed ...
Using an optical lever, the angular deformation at the tip of the cantilever is measure, allowing us to grasp the total cutting force involved during the machining process. ...
of linear displacement as the capacitive sensor does. ...
doi:10.1299/jsmelem.2013.7.220
fatcat:7g7tnrrkcnfork3svheorc52we
Micro/Nano-Scale Magnetic Robots for Biomedical Applications
2020
Materials Today Bio
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Magnetic small-scale robots are devices of great potential for the biomedical field because of the several benefits of this method of actuation. ...
Recent work on the development of these devices has seen tremendous innovation and refinement toward improved performance for potential clinical applications. ...
[52] used eight The key words used in the search were magnetic AND micro(nano)robots/machines/swimmers/propellers/motors. stationary and independently controlled electromagnets to achieve the manipulation ...
doi:10.1016/j.mtbio.2020.100085
pmid:33299981
pmcid:PMC7702192
fatcat:w2jqty476razfer7iwc3wr3pqe
ON MASS SENSING USING MICRO/NANO RESONATORS - APPROACHES, CHALLENGES AND DIRECTIONS
2016
International Journal on Smart Sensing and Intelligent Systems
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Micro/Nano electromechanical systems based Mass sensors are being increasingly used for detecting very low masses, with significant applications in bio-sensing as well as environmental sensing. ...
This paper reviews some of the research directions in this field. Various sensing and actuation strategies for these resonators are discussed. ...
DESIGN CHALLENGES AND OPPORTUNITIES We have explored various design choices in typical micro/nano resonator based sensors. ...
doi:10.21307/ijssis-2017-856
fatcat:6yegoggtjrfhpdcbgnji44jmte
Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: an analytical approach
2012
Micro & Nano Letters
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Limitations in design and suggestions for improvement of the scanner performance are discussed. ...
Results of finite-element analysis and experimentation on the scanner revealed natural frequencies of 10, 7.5 and 64 kHz for X, Y and Z stages, respectively. ...
Ports were provided on the scanner for mounting capacitive sensors and piezoelectric stack actuators. ...
doi:10.1049/mnl.2011.0477
fatcat:6yqwwvyctjbp7donskkp4cgzhi
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