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A Micro-Pressure Sensing Method Based on the Micropatterned Electrodes Filled with the Microspheres
2017
Materials
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Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate ...
The proposed sensor exhibits a stable and high sensing sensitivity of 0.741 kPa −1 to capacitance, good durability over 1000 cycles, and fast response time (<150 ms). ...
Researchers have continued to focus on improving the sensing sensitivity and reliability of flexible pressure sensors for application in a pressure range of less than 50 kPa to mimic human skin and tactile ...
doi:10.3390/ma10121439
pmid:29258232
pmcid:PMC5744374
fatcat:hf64vyfhu5gn5o5oefbdj6apf4
Direct Printing of Stretchable Elastomers for Highly Sensitive Capillary Pressure Sensors
2018
Sensors
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Unlike conventional capacitive pressure sensors where the capacitance changes were due to the pressure-induced interspace variations between the parallel plate electrodes, in our capillary sensors the ...
We demonstrate the successful fabrication of highly sensitive capillary pressure sensors using an innovative 3D printing method. ...
The frequency was fixed at 10 KHz for (a,b).
Table 1 . 1 Sensitivities of PDMS-based pressure sensors. Device Structures Sensitivity/KPa −1 Response Time/s Ref. ...
doi:10.3390/s18041001
pmid:29597265
pmcid:PMC5948908
fatcat:sqzsjapisfd7fhwv3tlt5l2ezu
Textile-Based Flexible Capacitive Pressure Sensors: A Review
2022
Nanomaterials
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This paper provides a comprehensive review of recent developments in textile-based flexible capacitive pressure sensors. ...
Flexible capacitive pressure sensors have been widely used in electronic skin, human movement and health monitoring, and human–machine interactions. ...
Therefore, device performance improves by optimizing the electrodes and the dielectric layer for interdigital electrode fabric capacitive pressure sensors. ...
doi:10.3390/nano12091495
pmid:35564203
pmcid:PMC9103991
fatcat:6bmrilba6vah5hzhl6uit7d4bm
Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications
2020
International Journal for Simulation and Multidisciplinary Design Optimization
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In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane for capacitive pressure sensors have been performed. ...
Such results open possibilities to utilize various materials for pressure sensor applications by means of the capacitance-based detection technique. ...
The geometrical properties and design parameters were analyzed for improving the sensitivity of the sensors. ...
doi:10.1051/smdo/2020010
fatcat:7kx6oyi5ijd5nak73mxfrj4lcm
Carbonized Cotton Fabric-Based Flexible Capacitive Pressure Sensor Using a Porous Dielectric Layer with Tilted Air Gaps
2021
Sensors
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In this study, we introduce a wide-range, highly sensitive, stable, reversible, and biocompatible pressure sensor based on a porous Ecoflex with tilted air-gap-structured and carbonized cotton fabric ( ...
The combination of knitted CCF electrodes and the porous dielectric with tilted air gaps achieved a sensitivity of 24.5 × 10−3 kPa−1 at 100 kPa, along with a wide detection range (1 MPa). ...
Acknowledgments: We thank Bomi Kim for providing administrative support.
Conflicts of Interest: The authors declare no conflict of interest. ...
doi:10.3390/s21113895
fatcat:dno546lw6vgobmxibzuxte3aim
A self-packaged capacitive humidity sensor with low leakage loss
2018
IEICE Electronics Express
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Meanwhile, both response time and recovery time of the sensors were short because one side of the sensitive layer was open to the air. Fig. 7. Calculated sensitive capacitance with the air gap. ...
An air gap was applied to separate two electrodes of the sensitive capacitor and reduce the leakage loss especially in high humidity environment. Two typical structures of the sensor were developed. ...
II Dynamic properties of the sensors Response time (s)
Recovery time (s)
Type 1
3.0
3.5
Type 2
2.1
2.7
Table III . ...
doi:10.1587/elex.15.20180577
fatcat:42vxsbioznelpmeiad6hvjbbcm
Highly Sensitive Pseudocapacitive Iontronic Pressure Sensor with Broad Sensing Range
2021
Nano-Micro Letters
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This study provides a demonstration for exploring pseudocapacitive materials for building flexible iontronic sensors with ultrahigh sensitivity and sensing range to advance the development of high-performance ...
Simultaneously, improving the response sensitivity and sensing range of flexible pressure sensors is a great challenge, which hinders the devices' practical application. ...
developed the top floating electrode for iontronic PPS with greatly enhanced sensitivity [20] . ...
doi:10.1007/s40820-021-00664-w
pmid:34138418
pmcid:PMC8193410
fatcat:swdft7j3afd27guzr7s73ivq5y
Flexible Capacitive Pressure Sensor Based on Microstructured Composite Dielectric Layer for Broad Linear Range Pressure Sensing Applications
2022
Micromachines
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More specifically, the proposed capacitive pressure sensor with 4.0 wt % cone-type MCDL could perceive external pressure loads with a broad detection range of 0–1.3 MPa, which yielded a high sensitivity ...
Along these lines, in this work, a novel flexible capacitive pressure sensor with microstructured composite dielectric layer (MCDL) is demonstrated. ...
On the contrary, for the pressure sensor with PCDL or cylinder-type microstructures, the sensitivity of the sensor would be lower. ...
doi:10.3390/mi13020223
pmid:35208347
pmcid:PMC8880179
fatcat:lidfrw6bxfce5ajw6prpe52s5u
Inkjet-printed, nanofiber-based soft capacitive pressure sensors for tactile sensing
2021
IEEE Sensors Journal
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These sensors exhibit improved sensitivity (4 MPa −1 ) at low pressures (<1 kPa) in contrast to sensors with a flat elastomer dielectric and can still detect large pressures around 50 kPa, having excellent ...
The proposed approach provides scalable solution for fabricating high-sensitivity printed sensors for e-skin and human-machine interfaces. ...
They would also like to thank Mari Honkanen and Turkka Salminen for their contributions with sample preparation and execution of the cross-sectional imaging. ...
doi:10.1109/jsen.2021.3085128
fatcat:ehy6bonebfdtzdwxhcpvqvzygy
Flexible piezocapacitive sensors based on wrinkled microstructures: toward low-cost fabrication of pressure sensors over large areas
2017
RSC Advances
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Wrinkled elastomeric templates prepared by stretching and releasing are utilized for demonstrating highly sensitive, simple, and low-cost piezocapacitive pressure sensors over large area. ...
Our pressure sensor constructed using the wrinkled Ecoex template between the upper and bottom electrodes demonstrated a high sensitivity for the detection of minute external pressures with a fast response ...
Note that an increase in the sensitivity to each pressure step in our system was also evident in the sensors prepared with the so PDMS electrodes. ...
doi:10.1039/c7ra06997a
fatcat:tervdle6ijcghjk2omeevqd4oi
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
2016
Micromachines
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A capacitive coupling structure is developed to improve the performances of a capacitive complementary metal oxide semiconductor (CMOS) microelectromechanical system (MEMS) humidity sensor. ...
Unlike a conventional structure, a thinner sensitive layer was employed to increase the coupling capacitance which dominated the sensitive capacitance of the humidity sensor. ...
A coupling electrode is employed in the improved structure to enhance the sensitive capacitance as well as the sensitivity. ...
doi:10.3390/mi7050074
pmid:30404251
pmcid:PMC6190121
fatcat:g52pwt4rkvef3gsyhbjygijzj4
A Novel Capacitive-Based Flexible Pressure Sensor Based on Stretchable Composite Electrodes and a Dielectric Elastomer with Microstructures
2020
IEEE Access
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This paper presents a novel capacitive-based flexible pressure sensor that achieves a relatively high sensitivity with an outstanding linearity over a large measurement range, as well as low-pressure detection ...
By comparing three types of microstructures for the elastomers, it is found that the cubic-structure type can achieve a high sensitivity (232 * 10 −4 kPa −1 ) with an excellent linearity of 99.4% in the ...
and 88.9 kPa were applied to the capacitive pressure sensor with 30 s duration each. ...
doi:10.1109/access.2020.3013797
fatcat:6zn25vyyjbbdlotoahqevl47ni
Human Motion State Recognition Based on Flexible, Wearable Capacitive Pressure Sensors
2021
Micromachines
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In this study, a new type of flexible capacitive pressure sensor is designed and applied to the recognition of human motion state. ...
The sensor has the advantages of high sensitivity (2.39 kPa−1), wide pressure range (0–120 kPa), low pressure resolution (6.8 Pa), fast response time (16 ms), fast recovery time (8 ms), lower hysteresis ...
The sensitivity of a capacitive pressure sensor is as follows [25] : ( ) 0 0 / δ δ − = ( ) C C C S P , (2) where S is the sensor sensitivity, C is the capacitance value output by the sensor after pressure ...
doi:10.3390/mi12101219
pmid:34683270
fatcat:boodecgfxjhdbemrdfpzvdyty4
All-Fabric-Based Flexible Capacitive Sensors with Pressure Detection and Non-Contact Instruction Capability
2022
Coatings
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Here, we demonstrate a pressure and non-contact bimodal fabric-only capacitive sensor with highly sensitive and ultralight detection. ...
Our textile-only capacitive bimodal sensor exhibits an excellent pressure-sensing sensitivity of 0.38 kPa−1, an ultralow detection limit (1.23 Pa), and cycling stability. ...
Furthermore, we thank Weidong Zhang from Jiangsu College of Engineering and Technology for some supports in testing and data analysis. ...
doi:10.3390/coatings12030302
fatcat:lumfvvlnfbb3xler5lvb74x7ni
Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity
2020
Nature Communications
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Sensitivity is a crucial parameter for flexible pressure sensors and electronic skins. ...
The intrafillable structure is a general design expected to be applied to other types of sensors to achieve a broader pressure-response range and a higher sensitivity. ...
Acknowledgements We thank the Materials Characterization and Preparation Center of SUSTech for assistance in the preparation of electrodes and support in materials characterization. ...
doi:10.1038/s41467-019-14054-9
pmid:31924813
pmcid:PMC6954251
fatcat:ksgmw6x6mven3lbfjm7sz2mbqa
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