In this study, we proposed a novel volumetric representation learning to perform 3D wafer handling in the Wafer Pattern Recognition (WPR) framework. The ...
Chip manufacturing based on the deep-ultraviolet (DUV) lithography and electron-beam lithography (EBL) enable rapid prototyping of PICs, which can be integrated ...
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To manufacture low- power, high-performance semiconductors, the degree of integration must be increased through miniaturization of circuits, which increases the ...
Recently, studies are conducted to increase the yield of wafers in the semiconductor industry. Through this, efforts are made to increase the productivity ...
The method exceeds in achieving high recall, crucial for identifying actual defective wafers as much as possible in semiconductor manufacturing, where defects ...
May 19, 2023 · Wafer map defect pattern classification is essential in semiconductor manufacturing processes for increasing production yield and quality by ...
[7] proposed an unsupervised approach to recognize wafer map patterns using a set of recognizers trained by generative adversarial networks (GAN); however, the ...
A wafer defect pattern recognition and analysis method based on convolutional neural network and it turns out that the appropriate dimensionality reduction ...
Apr 22, 2024 · Accurately identifying and recognizing defect patterns on WBMS can significantly contribute to optimizing production line processes, ultimately ...
Oct 30, 2023 · ... Pattern Recognition with Contrastive Learning ... representation learning from Wafer Bin Maps (WBM) in the semiconductor manufacturing process.