Mar 21, 2024 · Abstract: An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed.
An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed. Applying the hybrid serial-parallel-kinetic ...
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Mar 21, 2024 · An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed. Applying the hybrid serial ...
An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed. Applying the hybrid serial-parallel-kinetic ...
The -nanopositioner has its first resonant mode at 60 kHz and a travel range of 5 m. It consists of a piezoelectric stack actuator and a diaphragm flexure.
An ultra-high precision piezo nanopositioning stage with capacitive position feedback. By combining a very large scanning range with unique levels of precision ...
Jul 15, 2022 · Active microcantilevers with on-chip sensing and actuation provide significant advantages in tapping mode Atomic Force Microscopy (AFM).
A planar piezoelectric actuator using bending-bending hybrid modes is proposed. The actuator is composed four uniform transducers that can bend in the ...
An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed. Applying the hybrid serial-parallel-kinetic ...
Jan 20, 2023 · The stepping piezoelectric actuator is an important type of piezoelectric actuators. Its discovery was inspired by the inchworm's crawling. The ...