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"Research on electromechanical model of micro-accelerometer based on SOI ..."

Keqiang Qian, Wen Luo, Qi Yu (2011)

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DOI: 10.1109/ASICON.2011.6157214

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Keqiang Qian, Wen Luo, Qi Yu:
Research on electromechanical model of micro-accelerometer based on SOI technology. ASICON 2011: 433-436

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