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"Gaussian Time Error: A new index for fault detection in semiconductor ..."

Julien Marino et al. (2016)

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DOI: 10.1109/ACC.2016.7525416

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Julien Marino, Francesco Rossi, Mustapha Ouladsine, Jacques Pinaton:
Gaussian Time Error: A new index for fault detection in semiconductor processes. ACC 2016: 3237-3242

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